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Inorganic Coatings

Plasma technology enables the deposition of inorganic coatings using metalorganic precursors or reactive sputtering. For example SiOx, TiO2, Al2O3, ZnO as well as ITO and PZT can thus be deposited as thin layers on different substrates such as textiles and fibers.

SiOx, TiO2 serve as hydrophilic coatings, but also as barrier and photocatalytic active material (anatase TiO2 ). Ceramics of lead-zirconate-titanate [Pb(Zr,Ti) O3,(PZT)] can be used as sensors and actuators. Sn-doped indium oxide (Sn/ln2O3, ITO) belongs to the group of electrically conductive transparent oxides (TCOs).

SMART TEXTILES

Applying inorganic coatings for textiles promotes the development of "smart textiles" (wearable computing). Textile sensors, solar cells etc. become available in future.

 

Contact

Martin Amberg 
+41 58 765 75 74
martin.amberg@empa.ch

PZT coated Si wafer with the multilayer „Si/SiO2/Ti/Pt/Ti/PZT".
ITO coated PEEK foils: electrical resistivity as a function of the post annealing temperature.

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