Innovation in nanoelectronics and nano optics strongly relies on advancements and breakthroughs in fabrication technologies. We focus our research on the following techniques: nano-structuring by focused ion beams, micro-structuring by laser ablation, 3D printing, interface engineering by pulsed laser deposition. In addition we are creative in combining mentioned above methods with state-of-the-art technology and know-how available to us in BRNC and FIRST labs within ETH-domain.

I. Shorubalko, L. Pillatsch, I. Utke "Direct-Write Milling and Deposition with Noble Gases" book chapter in "Helium Ion Microscopy" Springer International Publishing (2016)

E. Hack, I. Shorubalko, J. Graf, P. Zolliker, and E. Mavrona "Fabrication of freestanding photonic devices combining polymer films with microfabrication techniques and 3D printing " Optics Express 31, 29968-29974 (2023)

M. Aramesh, C. Forró, L. Dorwling-Carter, I. Lüchtefeld, T. Schlotter, S. J. Ihle, I. Shorubalko, V. Hosseini, D. Momotenko, T. Zambelli, E. Klotzsch & J. Vörös "Localized detection of ions and biomolecules with a force-controlled scanning nanopore microscope" Nature Nanotechnology 14, 791 (2019)

I. Shorubalko, K. Choi, M. Stiefel, and H. G. Park "Ion beam profiling from the interaction with a freestanding 2D layer" Beilstein J Nanotechnol., 8, 682, (2017)

J. Buchheim, R. M. Wyss, I. Shorubalko, and H. G. Park "Understanding the interaction between energetic ions and freestanding graphene towards practical 2D perforation" Nanoscale, 8, 8345 (2016)

L. P. Zweifel, I. Shorubalko, and R.Y.H. Lim "Helium Scanning Transmission Ion Microscopy and Electrical Characterization of Glass Nanocapillaries with Reproducible Tip Geometries" ASC Nano, 10, 1918 (2016)

J. P. Best, J. Zechner, I. Shorubalko, J. V. Oboňa, J. Wehrs, M. Morstein, J. Michler "A comparison of three different notching ions for small-scale fracture toughness measurement" Scripta Materialia, 112, 71 (2016)

K. Celebi, J. Buchheim, R. M. Wyss, A. Droudian, P. Gasser, I. Shorubalko, J.-I. Kye, C. Lee, H. G. Park "Ultimate Permeation Across Atomically Thin Porous Graphene" Science, 344, 289 (2014)

O. Scholder, K. Jefimovs, I. Shorubalko, C. Hafner, U. Sennhauser, and G.-L. Bona "Helium focused ion beam fabricated plasmonic antennas with sub-5 nm gaps" Nanotechnology, 24, 395301 (2013)