FEBIP Codes
Documentation:
Continuum models of focused electron beam induced processing
Milos Toth, Charlene Lobo, Vinzenz Friedli, Aleksandra Szkudlarek and Ivo Utke
Beilstein J. Nanotechnol. 2015, 6, 1518-1540
a1) EMPA GIS simulator C++ code
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a2) EMPA GIS simulator executable files
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b) Single physisorbed gas species dimensionless FEBIP model for Gaussian Profile
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c) Single physisorbed gas species dimensionless FEBIP model for tophat Profile
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d) Two physisorbed gas species FEBIP model for exposure time dependence
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1) Single physisorbed gas species initial coverage calculator
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2) Single physisorbed gas species FEBIP model
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3) Gas mixture FEBIP model
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4) Gas mixture FEBIP model that incorporates diffusion
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5) Thermally activated chemisorption initial coverage calculator
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6) Thermally activated chemisorption
7) Thermally activated chemisorption with diffusion
8) EBIE with multiple reaction products
